Search results for "Czochralski process"
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Design of parallel compensator and stabilizing controller to mitigate non-minimum phase behaviour of the Czochralski Process
2020
Abstract This paper addresses the design of a parallel compensator and a stabilizing controller for the simplified crystal growth dynamics of the Czochralski (CZ) process, i.e., the process for the production of monocrystalline silicon ingots of uniform diameter. The diameter control of the produced ingots is achieved by a CCD camera measurement used to sense the radius of the boundary between the base of the growing crystal and the surrounding glowing meniscus — a raised melt surface connecting the crystal ingot with the flatter melt surface. Due to the intrinsic nature of the process, the bright ring radius measurement signal exhibits a non-minimum phase behaviour. A combination of the pa…
Numerical study of silicon crystal ridge growth
2014
Abstract The size of the ridge-like protrusions appearing on the external surface of dislocation-free 〈 100 〉 silicon crystals grown from a melt was studied theoretically. According to existing models the growth of the ridges is caused by the presence of { 111 } crystal planes at the crystal–melt interface. They affect the height of triple phase line, free surface orientation and the crystal growth angle. A numerical 2-dimensional model was proposed for the calculation of the size of the crystal ridges. The model included the effect of the undercooling of the crystal–melt interface on the crystal growth angle. The numerical model estimated the effect of the ridge size on the free surface at…